A double from the 3rd Division's leading marksman Scott Michie was enough to keep Peterhead at the top of the table.
Cowdenbeath manager Keith Wright felt his side could have taken something fron the game had they taken their early chances, while Peterhead boss Iain Stewart was happy to see his team grind out another victory to keep their unbeaten run going.
Peterhead went in front after nine minutes, Robert Raeside rising totally unchallenged to head in a David Hagen corner.
It was another Hagen corner kick which lead to the second goal in the 36th minute. A goalmouth scramble saw the ball break to Michie at the back post and he scored his ninth of the season with s low drive.
Cowdenbeath had several chances to score themselves, but home keeper Paul Mathers kept them at bay until five minutes before half-time when Darren Gribben scored with an angled drive from the left side of the goal.
A poor second half was brought to life by Michie's second goal after 72 minutes. It was created by an inch-perfect pass from Jamie Buchan which split the Fifer's defence and Michie nipped in to score and seal the win.